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Products

947, AB-47

CO2 injector

High quality processing, contamination-free devices ADT 947 CO2 Inline Injector is designed to eliminate particle adhesion and device damage caused by electrostatic effects. The units dissolve CO2 gas into de-ionized water (DI) used for dicing or cleaning processes, thus performing consistent control over an optimal level of resistivity.

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Product Introduction

High quality processing, contamination-free devices ADT 947 CO2 Inline Injector is designed to eliminate particle adhesion and device damage caused by electrostatic effects. The units dissolve CO2 gas into de-ionized water (DI) used for dicing or cleaning processes, thus performing consistent control over an optimal level of resistivity.

Machine Feature

  • Online monitoring and alarms
  • Resistivity target and range setting
  • Resistivity / Conductivity units display
  • Dicing Communication

Options

  • Extended resistivity range
  • Alarm buzzer

Specification

947 AB-47
Water capacity 3-10 liter/min 7-20 liter/min
Set point range 0.5 MΩ – 1 MΩ
Line voltage 110/220 V 50 Hz or 60 Hz
Machine dimensions (W x D x H) 190 x 446 x 365mm 190 x 492x 447mm
Approx. machine weight 10 kg 12 kg
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