Products
CO2 injector
High quality processing, contamination-free devices ADT 947 CO2 Inline Injector is designed to eliminate particle adhesion and device damage caused by electrostatic effects. The units dissolve CO2 gas into de-ionized water (DI) used for dicing or cleaning processes, thus performing consistent control over an optimal level of resistivity.
High quality processing, contamination-free devices ADT 947 CO2 Inline Injector is designed to eliminate particle adhesion and device damage caused by electrostatic effects. The units dissolve CO2 gas into de-ionized water (DI) used for dicing or cleaning processes, thus performing consistent control over an optimal level of resistivity.
| 947 | AB-47 | |
| Water capacity | 3-10 liter/min | 7-20 liter/min |
| Set point range | 0.5 MΩ – 1 MΩ | |
| Line voltage | 110/220 V 50 Hz or 60 Hz | |
| Machine dimensions (W x D x H) | 190 x 446 x 365mm | 190 x 492x 447mm |
| Approx. machine weight | 10 kg | 12 kg |
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Core components · Autonomous control
Local research and development · Accumulate steadily
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